A COMPREHENSIVE OVERVIEW OF RECENT DEVELOPMENTS IN RF-MEMS TECHNOLOGY-BASED HIGH-PERFORMANCE PASSIVE COMPONENTS FOR APPLICATIONS IN THE 5G AND FUTURE TELECOMMUNICATIONS SCENARIOS

The goal of this work is to provide an overview about the current development of radio-frequency microelectromechanical systems technology, with special attention towards those passive components bearing significant application potential in the currently developing 5G paradigm. Due to the required capabilities of such communication standard in terms of high data rates, extended allocated spectrum, use of massive MIMO (Multiple-Input-Multiple-Output) systems, beam steering and beam forming, the focus will be on devices like switches, phase shifters, attenuators, filters, and their packaging/integration. For each of the previous topics, several valuable contributions appeared in the last decade, underlining the improvements produced in the state of the art and the chance for RF-MEMS technology to play a prominent role in the actual implementation of the 5G infrastructure

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches

This work presents a bandpass-reconfigurable planar pseudohairpin filter based on RF-MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this class of filters offers a more compact size, and, in general, hairpin filters do not need ground connections for resonators. In this work, the U-shape resonators are arranged to obtain an interdigit capacitor to improve the coupling between the resonators. RF-MEMS switches modify the lengths of coupled resonators by adding microstrip segments to control the filter bandwidth, moving the center frequency and the return loss. An experimental hairpin tunable filter prototype based on RF-MEMS has been designed, fabricated, numerically and experimentally assessed, and compared concerning its tunability, quality factor, and capability with standard tunable filters based on PIN diodes. In conclusion, the tunable hairpin filter based on RF-MEMS switches offers the best performance in center frequency tuning range, compactness, and power consumption regarding reconfigurable filters based on standard PIN diodes switches. The obtained results are appealing and demonstrate the capabilities and potentialities of RF-MEMS to operate with the new communication standards that work at high microwave frequency bands

Prospects of Micro/Nanotechnologies (MEMS/NEMS) in the Emerging Scenario of 6G with Focus on RF-MEMS

The emerging scenarios of 6G and, on a longer term, of Future Networks (FN) will pose challenges that cannot be addressed relying on standard design and development approaches. The network is expected to turn into a system of systems, implementing self-management and self-evolutionary capacities, especially at the edge. This work sketches a prominent role for Micro and Nanotechnologies (MEMS/NEMS) in making visions of 6G and FN possible. A comprehensive description of 6G/FN is developed, along with a reformulation of the concept of Hardware (HW), capitalizing on MEMS/NEMS technologies. Finally, RF-MEMS technology (MEMS for Radio Frequency passives) is reported as an example of 6G/FN enabling solution

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches

This work presents a bandpass-reconfigurable planar pseudohairpin filter based on RF-MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this class of filters offers a more compact size, and, in general, hairpin filters do not need ground connections for resonators. In this work, the U-shape resonators are arranged to obtain an interdigit capacitor to improve the coupling between the resonators. RF-MEMS switches modify the lengths of coupled resonators by adding microstrip segments to control the filter bandwidth, moving the center frequency and the return loss. An experimental hairpin tunable filter prototype based on RF-MEMS has been designed, fabricated, numerically and experimentally assessed, and compared concerning its tunability, quality factor, and capability with standard tunable filters based on PIN diodes. In conclusion, the tunable hairpin filter based on RF-MEMS switches offers the best performance in center frequency tuning range, compactness, and power consumption regarding reconfigurable filters based on standard PIN diodes switches. The obtained results are appealing and demonstrate the capabilities and potentialities of RF-MEMS to operate with the new communication standards that work at high microwave frequency bands

RF MEMS switched K-Band Sierpinski resonators

Triangular resonators re-shaped with the Sierpinski geometry have been designed, implementing them with single-pole-double-through (SPDT) RF MEMS switches to provide fine-tuning for potential applications in the K-Band. Prototypes of band-stop filters working at 20 GHz and 26 GHz, for RADAR and satellite communications have been studied in coplanar waveguide (CPW) configuration. The tuning was obtained by switching between two device branches loaded with different resonators. As a result, dual-band operation can be obtained depending on the choice of the resonator. The studied filters belong to the more general group of devices inspired by the metamaterial design

Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology

U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail